Ukhuseleko lokusingqongileyo lunikwa ingqalelo ngakumbi nangakumbi, ingakumbi ngenxa yokwanda kwemozulu ebandayo. Ubunjineli bokucoca amagumbi yenye yeendlela zokukhusela okusingqongileyo. Ungayisebenzisa njani ubunjineli bokucoca amagumbi ukwenza umsebenzi olungileyo kukhuseleko lokusingqongileyo? Masithethe ngolawulo kubunjineli bokucoca amagumbi.
Ulawulo lobushushu kunye nokufuma kwigumbi elicocekileyo
Ubushushu kunye nokufuma kweendawo ezicocekileyo kuxhomekeka kakhulu kwiimfuno zenkqubo, kodwa xa kuhlangatyezwana neemfuno zenkqubo, kufuneka kuthathelwe ingqalelo intuthuzelo yomntu. Ngokuphucuka kweemfuno zokucoceka komoya, kukho umkhwa weemfuno ezingqongqo zobushushu kunye nokufuma okuqhubekayo.
Njengomgaqo jikelele, ngenxa yokuchaneka okwandayo kokucubungula, iimfuno zoluhlu lokuguquguquka kobushushu ziya zisiba ncinci. Umzekelo, kwinkqubo ye-lithography kunye nokuvezwa kwemveliso yesekethe edibeneyo enkulu, umahluko kwi-coefficient yokwandiswa kobushushu phakathi kweglasi kunye nee-silicon wafers ezisetyenziswa njengezinto zemaski uya usiba mncinci ngakumbi.
I-silicon wafer enobubanzi obuyi-100 μ m ibangela ukwanda okuthe tye kwe-0.24 μ m xa ubushushu bunyuka nge-1 degree. Ke ngoko, ubushushu obungaguqukiyo be-± 0.1 ℃ buyimfuneko, kwaye ixabiso lokufuma lihlala liphantsi kuba emva kokubila, imveliso iya kungcoliswa, ngakumbi kwiindawo zokusebenzela ze-semiconductor ezoyika i-sodium. Olu hlobo lwe-workshop akufuneki ludlule kwi-25℃.
Ukufuma okugqithisileyo kubangela iingxaki ezingaphezulu. Xa ukufuma okugqithisileyo kudlula i-55%, ukufuma kuya kwakheka eludongeni lombhobho wamanzi okupholisa. Ukuba kwenzeka kwizixhobo ezichanekileyo okanye kwiisekethe, kunokubangela iingozi ezahlukeneyo. Xa ukufuma okulinganiselweyo kuyi-50%, kulula ukugqwala. Ukongeza, xa ukufuma kuphezulu kakhulu, uthuli olunamathele kumphezulu we-silicon wafer luya kutsalwa ngeekhemikhali kumphezulu ngeemolekyuli zamanzi emoyeni, nto leyo enzima ukuyisusa.
Okukhona umswakama uphezulu, kokukhona kunzima ukususa ukunamathela. Nangona kunjalo, xa umswakama ungaphantsi kwama-30%, amasuntswana afunxwa lula phezu komhlaba ngenxa yesenzo samandla e-electrostatic, kwaye inani elikhulu lezixhobo ze-semiconductor zisengozini yokuqhekeka. Uluhlu lobushushu olufanelekileyo lokuvelisa i-silicon wafer yi-35-45%.
Uxinzelelo lomoyaulawulokwigumbi elicocekileyo
Kwiindawo ezininzi ezicocekileyo, ukuze kuthintelwe ungcoliseko lwangaphandle ukuba lungangeni, kuyimfuneko ukugcina uxinzelelo lwangaphakathi (uxinzelelo olungashukumiyo) luphezulu kunoxinzelelo lwangaphandle (uxinzelelo olungashukumiyo). Ukugcinwa komahluko woxinzelelo kufuneka kuhambelane nemigaqo elandelayo:
1. Uxinzelelo kwiindawo ezicocekileyo kufuneka lube phezulu kunolo kwiindawo ezingacocekanga.
2. Uxinzelelo kwiindawo ezinezinga eliphezulu lococeko kufuneka lube phezulu kunolo lukwiindawo ezikufutshane ezinezinga eliphantsi lococeko.
3. Iingcango eziphakathi kwamagumbi acocekileyo mazivulelwe kumagumbi anezinga eliphezulu lococeko.
Ukugcinwa komahluko woxinzelelo kuxhomekeke kubungakanani bomoya omtsha, ofanele ukwazi ukuhlawula ukuvuza komoya okuvela kumsantsa ophantsi kwalo mahluko woxinzelelo. Ngoko ke intsingiselo ebonakalayo yomahluko woxinzelelo kukumelana nokuvuza (okanye ukungena) komoya ohamba ngezithuba ezahlukeneyo kwigumbi elicocekileyo.
Ixesha lokuthumela: Julayi-21-2023