1. Ngaphakathi kwigumbi elicocekileyo, iintlobo ezahlukeneyo zamagumbi okugcina nokuhambisa iikhemikhali kufuneka zimiselwe ngokusekelwe kwiimfuno zenkqubo yokuvelisa imveliso kunye neempawu zomzimba nezekhemikhali zekhemikhali. Iipayipi kufuneka zisetyenziselwe ukubonelela ngeekhemikhali ezifunekayo kwizixhobo zokuvelisa. Amagumbi okugcina nokuhambisa iikhemikhali ngaphakathi kwigumbi elicocekileyo ahlala ekwindawo yemveliso encedisayo, ngokuqhelekileyo kumgangatho ophantsi wesakhiwo esinemigangatho enye okanye esinemigangatho emininzi, kufutshane nodonga lwangaphandle. Iikhemikhali kufuneka zigcinwe ngokwahlukeneyo ngokweempawu zazo zomzimba nezekhemikhali. Iikhemikhali ezingahambelaniyo kufuneka zibekwe kumagumbi okugcina nokuhambisa iikhemikhali ahlukeneyo, ahlukaniswe ziindawo eziqinileyo. Iikhemikhali eziyingozi kufuneka zigcinwe kumagumbi okugcina okanye okuhambisa ahlukeneyo anomlinganiselo wokumelana nomlilo ubuncinane iiyure eziyi-2.0 phakathi kwamagumbi akufutshane. La magumbi kufuneka abe kwigumbi elikumgangatho wokuqala wesakhiwo sokuvelisa, kufutshane nodonga lwangaphandle.
2. Amagumbi acocekileyo kwimizi-mveliso ye-elektroniki adla ngokuba namagumbi okugcina nokuhambisa i-asidi kunye ne-alkalis, kunye nezinyibilikisi ezinokutsha. Amagumbi okugcina nokuhambisa i-asidi adla ngokuba neenkqubo zokugcina nokuhambisa i-sulfuric acid, i-phosphoric acid, i-hydrofluoric acid, kunye ne-hydrochloric acid. Amagumbi okugcina nokuhambisa i-alkali adla ngokuba neenkqubo zokugcina nokuhambisa i-sodium hydroxide, i-hydroxide cake, i-ammonium hydroxide, kunye ne-tetramethylammonium hydroxide. Amagumbi okugcina nokuhambisa i-solvent ezinokutsha adla ngokuba neenkqubo zokugcina nokuhambisa i-organic solvents ezifana ne-isopropyl alcohol (IPA). Amagumbi acocekileyo kwizityalo zokwenziwa kwe-wafer yesekethe edibeneyo anamagumbi okugcina nokuhambisa i-polishing slurry. Amagumbi okugcina nokuhambisa i-chemical storage adla ngokuba kwiindawo zokuncedisa ukuvelisa okanye zokuxhasa kufutshane okanye kufutshane neendawo zokuvelisa ezicocekileyo, ngokuqhelekileyo kumgangatho wokuqala onokufikelela ngqo ngaphandle.
3. Amagumbi okugcina nokuhambisa iikhemikhali axhotyiswe ngeebhareli zokugcina okanye iitanki ezinomthamo owahlukeneyo ngokusekelwe kuhlobo, ubungakanani, kunye neempawu zokusetyenziswa kweekhemikhali ezifunekayo kwimveliso yemveliso. Ngokwemigangatho nemigaqo, iikhemikhali kufuneka zigcinwe ngokwahlukeneyo kwaye zihlelwe ngokwahlukeneyo. Umthamo weebhareli okanye iitanki ezisetyenzisiweyo kufuneka wanele ukusetyenziswa kweekhemikhali iintsuku ezisixhenxe. Iibhareli zemihla ngemihla okanye iitanki kufuneka zibonelelwe, zinomthamo owaneleyo wokugubungela ukusetyenziswa kweekhemikhali iiyure ezingama-24 ezifunekayo kwimveliso yemveliso. Amagumbi okugcina nokuhambisa izinyibilikisi ezinokutsha kunye neekhemikhali ezikhupha ioksijini kufuneka zahlulwe kwaye zahlulwe kumagumbi akufutshane ngodonga oluqinileyo olumelana nomlilo olunereyithingi yokumelana nomlilo yeeyure ezi-3.0. Ukuba zibekwe kumgangatho wokuqala wesakhiwo esinemigangatho emininzi, kufuneka zahlulwe kwezinye iindawo ngomgangatho ongatshiyo onomlinganiselo wokumelana nomlilo weeyure ezili-1.5 ubuncinane. Igumbi lolawulo eliphakathi lenkqubo yokhuseleko kunye nokubeka iliso kwiikhemikhali kwigumbi elicocekileyo kufuneka libekwe kwigumbi elahlukileyo.
4. Ukuphakama kwamagumbi okugcina nokuhambisa iikhemikhali kwigumbi elicocekileyo kufuneka kumiselwe ngokusekwe kwiimfuno zezixhobo kunye noyilo lwemibhobho kwaye ngokubanzi akufuneki kube ngaphantsi kweemitha ezi-4.5. Ukuba ikwindawo yokuvelisa eyongezelelweyo yegumbi elicocekileyo, ukuphakama kwegumbi lokugcina nokuhambisa iikhemikhali kufuneka kuhambelane nokuphakama kwesakhiwo.
Ixesha lokuthumela: Agasti-01-2025