1. Ukususwa kwamasuntswana othuli kwigumbi elingenathuli elicocekileyo
Umsebenzi oyintloko wegumbi elicocekileyo kukulawula ukucoceka, ukushisa kunye nomswakama we-atmosphere ukuba iimveliso (ezifana ne-silicon chips, njl.) zibonakaliswe, ukwenzela ukuba iimveliso ziveliswe kwaye zenziwe kwindawo efanelekileyo yokusingqongileyo. Le ndawo siyibiza ngokuba ligumbi elicocekileyo. Ngokwenkqubo yamazwe ngamazwe, inqanaba lokucoceka limiselwa ngokukodwa ngamasuntswana kwi-cubic meter yomoya kunye nobubanzi obukhulu kunomgangatho wokuhlelwa. Ngamanye amazwi, into ebizwa ngokuba yi-dust-free ayikho i-100% engenathuli, kodwa ilawulwa kwiyunithi encinci kakhulu. Ngokuqinisekileyo, amasuntswana adibana nomgangatho wothuli kulo mgangatho sele encinci kakhulu xa kuthelekiswa nothuli oluqhelekileyo esilubonayo, kodwa kwizakhiwo ze-optical, nokuba uthuli oluncinci luya kuba nefuthe elibi kakhulu, ngoko ke uthuli luyimfuneko engenakuphepheka ekuvelisweni kwemveliso yesakhiwo se-optical.
Ukulawula inani lamasuntswana othuli kunye nobukhulu beqhekeza elikhulu okanye elilingana ne-0.5 microns nge-cubic meter ukuya ngaphantsi kwe-3520 / cubic meter iya kufikelela kwiklasi A yomgangatho wamazwe ngamazwe ongenathuli. Umgangatho ongenathuli osetyenziswa kwimveliso ye-chip-level kunye nokucubungula uneemfuno eziphezulu zothuli kune-class A, kwaye umgangatho ophezulu onjalo usetyenziswa kakhulu ekuveliseni ezinye iitshiphusi eziphezulu. Inani lamasuntswana othuli lilawulwa ngokungqongqo kwi-35,200 nge-cubic meter nganye, eyaziwa ngokuqhelekileyo njengeklasi B kwishishini legumbi elicocekileyo.
2. Iintlobo ezintathu zeendawo ezicocekileyo zegumbi
Igumbi elingenanto elicocekileyo: indawo yegumbi elicocekileyo elakhiweyo nelinokusetyenziswa. Inazo zonke iinkonzo ezifanelekileyo kunye nemisebenzi. Nangona kunjalo, akukho zixhobo ezisetyenziswa ngabaqhubi kwiziko.
Igumbi elicocekileyo elicocekileyo: indawo yegumbi elicocekileyo elinemisebenzi epheleleyo, iisetingi ezifanelekileyo kunye nofakelo, olunokusetyenziswa ngokwezicwangciso okanye olusetyenziswayo, kodwa akukho baqhubi kwindawo.
Igumbi elicocekileyo elinamandla: igumbi elicocekileyo elisetyenziswa ngokuqhelekileyo, elinemisebenzi epheleleyo yenkonzo, izixhobo kunye nabasebenzi; ukuba kuyimfuneko, umsebenzi oqhelekileyo unokuqhutywa.
3. Izinto zokulawula
(1). Inokususa amasuntswana othuli adada emoyeni.
(2). Inokuthintela ukuveliswa kwamasuntswana othuli.
(3). Ukulawula ubushushu kunye nokufuma.
(4). Ulawulo loxinzelelo.
(5). Ukupheliswa kweegesi eziyingozi.
(6). Ukuxinana komoya kwezakhiwo kunye namacandelo.
(7). Ukuthintelwa kombane ongatshintshiyo.
(8). Ukuthintelwa kokuphazamiseka kwe-electromagnetic.
(9). Ukuqwalaselwa kwemiba yokhuseleko.
(10). Ukuqwalaselwa ukonga amandla.
4. Ukuhlelwa
Uhlobo lokuqukuqela kwesiphithiphithi
Umoya ungena kwigumbi elicocekileyo ukusuka kwibhokisi ye-air conditioning ngokusebenzisa i-air filter kunye ne-air filter (HEPA) kwigumbi elicocekileyo, kwaye ubuyiselwa kwiipaneli zodonga zokwahlula okanye imigangatho ephakamileyo kumacala omabini egumbi elicocekileyo. Ukuhamba komoya akuhambi ngendlela elandelelanayo kodwa kubonisa isiphithiphithi esingaqhelekanga okanye imeko edidayo. Olu hlobo lufanelekile kwiklasi ye-1,000-100,000 igumbi elicocekileyo.
Inkcazo: Igumbi elicocekileyo apho ukuhamba komoya kuhamba ngesantya esingalinganiyo kwaye asihambelani, sikhatshwa yi-backflow okanye eddy current.
Umgaqo: Amagumbi acocekileyo ahlambulukileyo axhomekeke ekuhanjisweni komoya ngokuqhubekayo ukuhlambulula umoya wangaphakathi kwaye ngokuthe ngcembe ahlambulule umoya ongcolileyo ukuze afezekise ukucoceka (amagumbi acocekileyo ahlambulukileyo ngokuqhelekileyo ayilwa kumanqanaba ococeko ngaphezu kwe-1,000 ukuya kwi-300,000).
Iimpawu: Amagumbi ahlambulukileyo ahlambulukileyo axhomekeke kwi-ventilation emininzi ukufezekisa ukucoceka kunye namanqanaba ococeko. Inani leenguqu ze-ventilation limisela inqanaba lokucoca kwinkcazo (utshintsho olungakumbi lokungena komoya, liphezulu izinga lokucoceka)
(1) Ixesha lokuzihlambulula: libhekisela kwixesha apho igumbi elicocekileyo liqala ukubonelela ngomoya kwigumbi elicocekileyo ngokwenani le-ventilation eyenzelwe kwaye ugxininiso lothuli kwigumbi lufikelela kwinqanaba lokucoceka eliyilelwe iklasi ye-1,000 kulindeleke ukuba ingabi ngaphezu kwemizuzu engama-20 (imizuzu eyi-15 ingasetyenziselwa ukubala) iklasi ye-10,000 ilindeleke ukuba isetyenziswe ngaphezu kwemizuzu engama-30 (imizuzu engama-2) I-100,000 ilindeleke ukuba ingabi ngaphezu kwemizuzu engama-40 (imizuzu engama-30 ingasetyenziselwa ukubala)
(2) I-ventilation frequency (eyenzelwe ngokweemfuno zexesha lokuzicoca apha ngasentla) iklasi 1,000: 43.5-55.3 amaxesha / iyure (umgangatho: amaxesha angama-50 / iyure) iklasi 10,000: 23.8-28.6 amaxesha / iyure (umgangatho: amaxesha angama-25 / iyure, 00 40: 10 yure) iklasi 1000. (umgangatho: amaxesha angama-15 / iyure)
Izinto eziluncedo: isakhiwo esilula, iindleko zokwakhiwa kwenkqubo ephantsi, kulula ukwandisa igumbi elicocekileyo, kwezinye iindawo ezikhethekileyo, ibhentshi ecocekileyo engenathuli ingasetyenziselwa ukuphucula ibakala legumbi elicocekileyo.
Ukungalungi: iincinci zothuli ezibangelwa yi-turbulence float kwindawo yangaphakathi kwaye kunzima ukukhutshwa, ezinokungcolisa ngokulula iimveliso zenkqubo. Ukongeza, ukuba inkqubo imisiwe kwaye emva koko isebenze, ihlala ithatha ixesha elide ukufezekisa ukucoceka okufunekayo.
Ukuhamba kweLaminar
Umoya wokuhamba kweLaminar uhamba ngendlela efanayo. Umoya ungena kwigumbi ngesihluzi esine-100% yereyithi yokugquma kwaye ubuyiselwa ngomgangatho ophakamileyo okanye iibhodi zokwahlula kumacala omabini. Olu hlobo lufanelekile ukusetyenziswa kwiindawo ezicocekileyo zamagumbi ezinamabakala aphezulu acocekileyo, ngokubanzi iklasi 1 ~ 100. Kukho iindidi ezimbini:
(1) Ukuqukuqela okuthe tyaba kwelaminar: Umoya othe tyaba uvuthelwa ngaphandle kwisihluzo kwicala elinye kwaye ubuyiswe yinkqubo yomoya yokubuyisela kudonga oluchaseneyo. Uthuli lukhutshelwa ngaphandle ngecala lomoya. Ngokubanzi, ungcoliseko lunobuzaza ngakumbi kwicala elisezantsi lomlambo.
Izinto eziluncedo: Isakhiwo esilula, sinokuzinza ngexesha elifutshane emva kokusebenza.
Izinto ezingeloncedo: Ixabiso lokwakha liphezulu kunesiphithiphithi, kwaye indawo yangaphakathi akulula ukwandisa.
(2) Ukuhamba kwe-laminar ethe nkqo: Isilingi yegumbi igutyungelwe ngokupheleleyo ngeefilitha ze-ULPA, kwaye umoya uvuthelwa ukusuka phezulu ukuya ngasezantsi, onokufikelela ukucoceka okuphezulu. Uthuli oluveliswa ngexesha lenkqubo okanye ngabasebenzi banokukhutshwa ngokukhawuleza ngaphandle ngaphandle kokuchaphazela ezinye iindawo zokusebenza.
Izinto eziluncedo: Ukulawula ngokulula, urhulumente ozinzile unokufezekiswa ngexesha elifutshane emva kokuba umsebenzi uqalile, kwaye awuchatshazelwa lula ngurhulumente okanye abaqhubi.
Izinto ezingeloncedo: Iindleko eziphezulu zokwakha, kunzima ukusebenzisa indawo eguquguqukayo, ii-hanger zesilingi zithatha indawo eninzi, kwaye kuyingxaki ukulungisa nokutshintsha izihluzi.
Uhlobo oluhlanganisiweyo
Uhlobo oludityanisiweyo kukudibanisa okanye ukusebenzisa uhlobo lokuqukuqela kwesiphithiphithi kunye nodidi lokuhamba kwe-laminar kunye, olunokubonelela ngomoya ococekileyo wengingqi.
(1) I-Tunnel ecocekileyo: Sebenzisa izihlungi ze-HEPA okanye i-ULPA ukugubungela i-100% yendawo yenkqubo okanye indawo yokusebenza ukunyusa izinga lokucoceka ukuya phezulu kwiKlasi ye-10, enokugcina iindleko zokufakela kunye nokusebenza.
Olu hlobo ludinga indawo yokusebenza yomsebenzi ukuba ibe yodwa kwimveliso kunye nokugcinwa komatshini ukuphepha ukuchaphazela umsebenzi kunye nomgangatho ngexesha lokugcinwa komatshini.
Iitonela ezicocekileyo zinezinye iingenelo ezimbini: A. Kulula ukwandisa ngokuguquguqukayo; B. Ukugcinwa kwezixhobo kunokwenziwa lula kwindawo yokulungisa.
(2) I-Tube ecocekileyo: Ujikeleze kwaye uhlambulule umgca wokuvelisa ngokuzenzekelayo apho ukuveliswa kwemveliso kudlula khona, kwaye ukwandise inqanaba lokucoceka ukuya ngaphezu kweklasi 100. Ngenxa yokuba imveliso, umqhubi kunye nendalo evelisa uthuli ihlukanisiwe, umthamo omncinci wokunikezelwa komoya unokufezekisa ucoceko oluhle, olunokugcina amandla kwaye lufanelekile kakhulu kwimigca yokuvelisa ngokuzenzekelayo engadingi umsebenzi wezandla. Isebenza kumashishini amayeza, ukutya kunye ne-semiconductor.
(3) I-Spot ecocekileyo: Inqanaba lokucoceka kwendawo yenkqubo yemveliso kwigumbi elicocekileyo elinokuphazamiseka kunye nenqanaba legumbi elicocekileyo le-10,000 ~ 100,000 linyuswe kwi-10 ~ 1000 okanye ngaphezulu ngenjongo yokuvelisa; Izitulo zokusebenza ezicocekileyo, iishedi ezicocekileyo, amagumbi acocekileyo asele elungiselelwe, kunye neewodrophu ezicocekileyo zolu didi.
Ibhentshi ecocekileyo: iklasi 1 ~ 100.
I-booth ecocekileyo: Indawo encinci ejikelezwe ngelaphu le-anti-static transparent kwisithuba segumbi elicocekileyo, usebenzisa i-HEPA ezimeleyo okanye i-ULPA kunye neeyunithi zokupholisa umoya ukuze ibe yindawo ecocekileyo yomgangatho ophezulu, kunye nenqanaba le-10 ~ 1000, ukuphakama malunga ne-2.5 yeemitha, kunye nommandla wokugubungela malunga ne-10m2 okanye ngaphantsi. Ineentsika ezine kwaye ixhotyiswe ngamavili ashukumayo ukuze isetyenziswe bhetyebhetye.
5. Ukuhamba komoya
Ukubaluleka kokuhamba komoya
Ukucoceka kwegumbi elicocekileyo kuhlala kuchaphazeleka kukuhamba komoya. Ngamanye amazwi, ukuhamba kunye nokusasazwa kothuli oluveliswa ngabantu, amacandelo omatshini, izakhiwo zokwakha, njl. zilawulwa yi-airflow.
Igumbi elicocekileyo lisebenzisa i-HEPA kunye ne-ULPA ukucoca umoya, kwaye izinga lokuqokelela uthuli liphezulu njenge-99.97 ~ 99.99995%, ngoko ke umoya ohluzwe ngolu hlobo unokuthiwa ucoceke kakhulu. Nangona kunjalo, ukongeza kubantu, kukho nemithombo yothuli efana noomatshini kwigumbi elicocekileyo. Nje ukuba olu thuli lwenziwe lusasazeke, akunakwenzeka ukugcina indawo ecocekileyo, ngoko ke ukuhamba komoya kufuneka kusetyenziswe ukukhupha uthuli olwenziwayo ngaphandle.
Imiba Enempembelelo
Kukho izinto ezininzi ezichaphazela ukuhamba komoya kwegumbi elicocekileyo, njengezixhobo zenkqubo, abasebenzi, izixhobo zokuhlanganisa igumbi elicocekileyo, izibane zokukhanyisa, njl. Ngelo xesha, indawo yokuguqula i-airflow ngaphezu kwezixhobo zokuvelisa kufuneka ithathelwe ingqalelo.
Indawo yokuphazamisa ukuhamba komoya kumphezulu wetafile yokusebenza ngokubanzi okanye izixhobo zokuvelisa kufuneka zimiselwe kwi-2/3 yomgama phakathi kwendawo ecocekileyo yegumbi kunye nebhodi yokwahlula. Ngale ndlela, xa umqhubi esebenza, ukuhamba komoya kunokuhamba ukusuka ngaphakathi kwendawo yenkqubo ukuya kwindawo yokusebenza kwaye kuthathe uthuli; ukuba indawo yokuphambukisa iqwalaselwe phambi kwendawo yenkqubo, iya kuba sisiphazamiso esingafanelekanga sokuhamba komoya. Ngeli xesha, ininzi yomoya iya kuhamba ngasemva kwendawo yenkqubo, kwaye uthuli olubangelwa ngumsebenzi womqhubi luya kuqhutyelwa ngasemva kwesixhobo, kwaye i-workbench iya kungcoliswa, kwaye isivuno siya kuncipha ngokuqinisekileyo.
Imiqobo efana neetafile zokusebenza kumagumbi acocekileyo ziya kuba nemisinga eddy ekudibaneni, kwaye ukucoceka kufutshane nabo kuya kuba kubi kakhulu. Ukugaya umngxuma wokubuyisela umoya kwitafile yomsebenzi kuya kunciphisa i-eddy yangoku; ingaba ukhetho lwezixhobo zendibano lufanelekile kwaye nokuba i-layout yesixhobo igqibelele nayo zizinto ezibalulekileyo zokuba i-airflow iba yinto ye-eddy yangoku.
6. Ukwakhiwa kwegumbi elicocekileyo
Ukubunjwa kwegumbi elicocekileyo liqulunqwe ngezi nkqubo zilandelayo (akukho nanye eyimfuneko kwiimolekyuli zenkqubo), ngaphandle koko akuyi kuba nako ukwenza igumbi elicocekileyo elipheleleyo neliphezulu:
(1) Inkqubo yesilingi: kubandakanywa intonga yesilingi, i-I-beam okanye i-U-beam, igridi yesilingi okanye isakhelo sesilingi.
(2) Inkqubo yokupholisa umoya: kuquka i-air cabin, inkqubo yokucoca, i-windmill, njl.
(3) Udonga olucandiweyo: kuquka iifestile neengcango.
(4) Umgangatho: kubandakanywa umgangatho ophakamileyo okanye umgangatho ochasene ne-static.
(5) Izibane zokukhanyisa: Isibane esisicaba sokuhlanjululwa kwe-LED.
Isakhiwo esiphambili segumbi elicocekileyo lenziwe ngokubanzi ngeentsimbi zentsimbi okanye i-samente yethambo, kodwa kungakhathaliseki ukuba luhlobo luni lwesakhiwo, kufuneka luhlangabezane nale miqathango ilandelayo:
A. Akukho zintanda ziya kwenzeka ngenxa yotshintsho lobushushu kunye nokungcangcazela;
B. Akulula ukuvelisa amasuntswana othuli, kwaye kunzima ukuba amasuntswana aqhoboshele;
C. I-hygroscopicity ephantsi;
D. Ukuze kugcinwe iimeko zokufuma kwigumbi elicocekileyo, i-thermal insulation kufuneka ibe phezulu;
7. Ukuhlelwa ngokusetyenziswa
Igumbi elicocekileyo lemizi-mveliso
Ulawulo lwamasuntswana angaphiliyo yinto. Ikakhulu ilawula ukungcoliseka kwamasuntswana othuli lomoya kwinto esebenzayo, kwaye ingaphakathi ngokubanzi igcina imeko yoxinzelelo oluhle. Ifanelekile kumashishini oomatshini bokuchaneka, imboni ye-elektroniki (i-semiconductors, iisekethe ezidibeneyo, njl.), imboni ye-aerospace, i-high-purity industry yekhemikhali, imboni yamandla e-athomu, imveliso yemveliso ye-optical kunye nemagnethi (i-CD, ifilimu, imveliso ye-tape) LCD (iglasi ye-crystal yamanzi), i-computer hard disk, imveliso yentloko yekhompyutha kunye namanye amashishini.
Igumbi elicocekileyo lebhayoloji
Ikakhulu ilawula ukungcoliseka kwamasuntswana aphilayo (iibhaktheriya) kunye namasuntswana angaphiliyo (uthuli) kwinto esebenzayo. Inokwahlulwa ibe;
A. Igumbi elicocekileyo lebhayoloji: ikakhulu lilawula ukungcoliseka kwezinto ezincinci (iibhaktiriya). Kwangaxeshanye, izixhobo zayo zangaphakathi kufuneka zikwazi ukumelana nokhukuliseko lwee-agent ezahlukeneyo zokubulala iintsholongwane, kwaye ingaphakathi ngokubanzi liqinisekisa uxinzelelo olulungileyo. Ngokusisiseko, imathiriyeli yangaphakathi kufuneka ikwazi ukumelana nonyango olwahlukeneyo lokuvala inzala kwigumbi elicocekileyo lemizi-mveliso. Imizekelo: imboni yamachiza, izibhedlele (amagumbi okusebenza, iiwadi ezingenazintsholongwane), ukutya, izithambiso, ukuveliswa kwemveliso yesiselo, iilebhu zezilwanyana, iilebhu zokuvavanya umzimba kunye neekhemikhali, izikhululo zegazi, njl.
B. Igumbi elicocekileyo lokhuseleko lwebhayoloji: ikakhulu lilawula ukungcoliseka kwamasuntswana aphilayo ento esebenzayo kwilizwe langaphandle nakubantu. Uxinzelelo lwangaphakathi kufuneka lugcinwe lungalunganga kunye nomoya. Imizekelo: ibhayoloji, ibhayoloji, iilabhoratri ezicocekileyo, ubunjineli bomzimba (ijene eziphinda zihlangane, ukulungiswa kwesitofu)
Ixesha lokuposa: Feb-07-2025